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Stress relief patterns of hydrogenated amorphous carbon films grown by dc-pulse plasma chemical vapor deposition 期刊论文
Applied Surface Science, 2008, 卷号: 255, 页码: 1836-1840
Authors:  Wang Q(王琦);  Wang CB(王成兵);  Wang Z(王舟);  Zhang JY(张俊彦);  He DY(贺德衍)
Adobe PDF(1128Kb)  |  Favorite  |  View/Download：122/2  |  Submit date：2013/03/28
Amorphous Carbon  Stress  Buckling  Dc-pulse Plasma Chemical Vapor Deposition  
Ripple surface generated on hydrogenated amorphous carbon nitride films 期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 4099-4102
Authors:  Wang CB(王成兵);  Yang SR(杨生荣);  Zhang JY(张俊彦)
Adobe PDF(536Kb)  |  Favorite  |  View/Download：177/2  |  Submit date：2013/11/01
Carbon Nitride Films  Ripple Morphology