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Synthesis and characterization of quaternary Ti-Si-C-N film deposited by middle frequency magnetron sputtering 期刊论文
Advanced Materials Research, 2012, 卷号: 581-582, 页码: 540-543
Authors:  Jiang JL(姜金龙);  Chen D(陈娣);  Zhu WJ(朱伟君);  Jiang JL(姜金龙)
Adobe PDF(1404Kb)  |  Favorite  |  View/Download：325/3  |  Submit date：2013/07/12
Ti-si-c-n Films  Microstructure  Mf Magnetron Sputtering  
磁控溅射 Al 靶功率对类金刚石薄膜结构和摩擦学性能的影响 期刊论文
摩擦学学报, 2011, 卷号: 31, 期号: 3, 页码: 304-309
Authors:  周升国;  王立平;  薛群基
Adobe PDF(4108Kb)  |  Favorite  |  View/Download：228/0  |  Submit date：2012/09/24
磁控溅射  Al/a-c:h  纳米复合薄膜  摩擦学性能  Magnetron Sputtering  Nanocomposite  Tribological Property