| Superlow friction of titanium/silicon codoped hydrogenated amorphous carbon film in the ambient air | |
| Department | 固体润滑国家重点实验室 |
Jiang JL(姜金龙); Hao JY(郝俊英) ; Wang P(王鹏); Liu WM(刘维民)
| |
| 2010 | |
| Source Publication | Journal of Applied Physics
 |
| ISSN | 0021-8979 |
| Volume | 108Pages:33510(1-6) |
| Abstract | Titanium/silicon codoped hydrogenated carbon film was deposited on the n-Si 100 substrates byreactive magnetron sputtering Ti80Si20 target in a mixture of argon and methane. Microstructure ofthe film was investigated using x-ray photoelectron spectroscopy, high-resolution transmissionelectron microscopy, Raman spectroscopy, and attenuated total reflectance Fourier transforminfrared spectroscopy. The investigations have revealed that the film has an amorphous structure andconsists of high sp2hybridized carbon atoms and bonding hydrogen atoms. The mechanical andtribological properties were evaluated using a nanoindentor and a ball-on-disk tribometer,respectively. The film exhibits hardness of 9.6 GPa, high elastic recovery of 73.0% and high H/Eratio of 0.156. Most significant, the superlow friction 0.01 and special low wear rate 2.4 10−7mm3N−1m−1 was observed in ambient air with 40% relative humidity. Combining theresults of scanning electron microscopy and Raman analyses of the worn surface, it is concludedthat some mechanisms, e.g., transfer films, friction-induced graphitization, hydrogen-terminatedcarbon surface, tribochemical reaction, etc., could be together responsible for this superlow frictionin the ambient air. |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the Natural Science Foundation of China (Grant Nos. 50905177, 509052133);973 Project(Grant No. 2007CB607601) of the Ministry of Science and Technology of China. |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 空间润滑材料组 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/997 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Liu WM(刘维民) |
| Recommended Citation GB/T 7714 | Jiang JL,Hao JY,Wang P,et al. Superlow friction of titanium/silicon codoped hydrogenated amorphous carbon film in the ambient air[J]. Journal of Applied Physics,2010,108:33510(1-6). |
| APA | 姜金龙,郝俊英,王鹏,&刘维民.(2010).Superlow friction of titanium/silicon codoped hydrogenated amorphous carbon film in the ambient air.Journal of Applied Physics,108,33510(1-6). |
| MLA | 姜金龙,et al."Superlow friction of titanium/silicon codoped hydrogenated amorphous carbon film in the ambient air".Journal of Applied Physics 108(2010):33510(1-6). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 201033510.pdf（1269KB） | 开放获取 | License | View Application Full Text | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment