| Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering | |
| Department | 固体润滑国家重点实验室 |
Zhang B(张斌) ; Yu YL(于元烈); Wang Z(王舟); Zhang JY(张俊彦)
| |
| 2010 | |
| Source Publication | Applied Surface Science
 |
| ISSN | 0169-4332 |
| Volume | 256Pages:6506-6511 |
| Abstract | Different nitrogen doped amorphous carbon (CNx) films were obtained by magnetron sputtering of car-bon target in argon and nitrogen atmosphere at the increasing negative bias voltages from 0 to 150V.The films structures have experienced great change, from the novel column to nanoporous structure atthe bias voltage of 0V to the porous structure at 150V. The proposed growth process was that the CNxnuclei grewat 0V acted as the “seeds” for the growth of the nanocolumns, and ion etching effects at 150Vinduced the formation of nanoporous structures. Furthermore, a comparison study showed that the fieldemission properties of the CNx films were related with the introduction of the nitrogen atoms, the sizeand concentration of sp2 C clusters and the surface roughness. The filmswith rougher surface have lowerthreshold field. |
| Keyword | Nanocolumn Structure Nanoporous Structure Field Emission Properties |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the“863” program of Chinese Ministry of Science and Technology, with grant No. 2007AA03Z338;National Science Foundation of China (Nos. 50823008, 50975273) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 纳米润滑材料组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/960 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Zhang JY(张俊彦) |
| Recommended Citation GB/T 7714 | Zhang B,Yu YL,Wang Z,et al. Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering[J]. Applied Surface Science,2010,256:6506-6511. |
| APA | 张斌,于元烈,王舟,&张俊彦.(2010).Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering.Applied Surface Science,256,6506-6511. |
| MLA | 张斌,et al."Structure evolution from nanocolumns to nanoporous of nitrogen doped amorphous carbon films deposited by magnetron sputtering".Applied Surface Science 256(2010):6506-6511. |
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| 20106506-6511.pdf（1120KB） | 开放获取 | License | View Application Full Text | |||
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