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The structure and tribological properties of aluminum/carbon nanocomposite thin films synthesized by reactivemagnetron sputtering
Department固体润滑国家重点实验室
Zhou SG(周升国); Wang LP(王立平); Xue QJ(薛群基)
2011
Source PublicationSurface and Interface Analysis
ISSN0142-2421
Volume43Pages:1057-1063
AbstractHydrogenated nanocomposite aluminum/carbon thin films (Al/a-C :H) were fabricated on stainless steel and silicon wafer substrates via unbalanced reactive magnetron sputtering from an Al target in CH4/Ar plasma. The composition and structure of Al/a-C :H films were investigated by high-resolution transmission electron microscope (HRTEM), XPS and micro-Raman spectroscopy. Nanoindenter, interferometer and ball-on-disc tribometer were carried out to evaluate the hardness, internal stress and tribological properties of Al/a-C :H films. HRTEM observations confirmed that the metallic Al nanocrystallites were uniformly dispersed in the amorphous carbon matrix. XPS and Raman analyses indicated that the sp2 content increased with the increase of Al content in the films. Nanoindenter and interferometer tests exhibited that the uniform incorporation of Al nanocrystallites can diminish drastically themagnitude of internal stresswithmaintaining the higher hardness of as-deposited films. Especially, the ball-on-disc tribometer measurements revealed that the nanocomposite film with 2.3 at.% Al content exhibited relatively better wear resistance and self-lubrication performance with a friction coefficient of 0.06 and wear rate of 3.1 × 10−16 m3/N·munder ambient air, which can be attributed to the relatively higher hardness, the formation of continuous graphitized transfer filmon counterface and the reduced reaction of oxygenwith carbon.
KeywordNaocomposite Al/a-c:h Internal Stress Tribological Properties
Subject Area材料科学与物理化学
Funding Organizationthe Natural Science Foundation of China (NO.50905178);the 863 Program of Chinese Ministry of Science and Technology (NO.2009AA03Z105)
Indexed BySCI
Language英语
Funding Project低维材料摩擦学组
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/829
Collection固体润滑国家重点实验室(LSL)
Corresponding AuthorWang LP(王立平)
Recommended Citation
GB/T 7714
Zhou SG,Wang LP,Xue QJ. The structure and tribological properties of aluminum/carbon nanocomposite thin films synthesized by reactivemagnetron sputtering[J]. Surface and Interface Analysis,2011,43:1057-1063.
APA 周升国,王立平,&薛群基.(2011).The structure and tribological properties of aluminum/carbon nanocomposite thin films synthesized by reactivemagnetron sputtering.Surface and Interface Analysis,43,1057-1063.
MLA 周升国,et al."The structure and tribological properties of aluminum/carbon nanocomposite thin films synthesized by reactivemagnetron sputtering".Surface and Interface Analysis 43(2011):1057-1063.
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