LICP OpenIR  > 固体润滑国家重点实验室(LSL)
Microstructure and tribological behavior via modified F and Si content in duplex (F:Si)-doped carbon-based coatings
Department固体润滑国家重点实验室
Zhang RH(张仁辉)1,2; Lu ZB(鲁志斌)1; Lu ZB(鲁志斌)
2015
Source PublicationSurface and Interface Analysis
ISSN0142-2421
Volume47Issue:10Pages:946-952
AbstractIn this paper, the amorphous carbon-based coatings containing F and Si (a-C:F:Si) are successfully fabricated using a plane hollow cathode plasma-enhanced chemical vapor deposition method. The results show that the mechanical properties of these coatings, such as hardness, elastic modulus, friction and wear, are closely affected by the content of F and Si. We systematically examine the microstructure and composition of these coatings using SEM, XPS, AFM and Raman for understanding of the underlying frictional mechanism.
KeywordAfm Carbon-based Coatings Wear Hardness Graphitization
Subject Area材料科学与物理化学
DOI10.1002/sia.5798
Funding Organizationthe National Natural Science Foundation of China (Grant 11172300)
Indexed BySCI
If1.018
Language英语
Funding Project低维材料摩擦学组
compositor第一作者单位
Citation statistics
Cited Times:10[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/7472
Collection固体润滑国家重点实验室(LSL)
Corresponding AuthorLu ZB(鲁志斌)
Affiliation1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Zhang RH,Lu ZB,Lu ZB. Microstructure and tribological behavior via modified F and Si content in duplex (F:Si)-doped carbon-based coatings[J]. Surface and Interface Analysis,2015,47(10):946-952.
APA Zhang RH,Lu ZB,&鲁志斌.(2015).Microstructure and tribological behavior via modified F and Si content in duplex (F:Si)-doped carbon-based coatings.Surface and Interface Analysis,47(10),946-952.
MLA Zhang RH,et al."Microstructure and tribological behavior via modified F and Si content in duplex (F:Si)-doped carbon-based coatings".Surface and Interface Analysis 47.10(2015):946-952.
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