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A simple one-step solution deposition process for constructing high-performance amorphous zirconium oxide thin film
Department固体润滑国家重点实验室
Mi YJ(密永娟)1,2; Wang JQ(王金清)1; Yang ZG(杨志刚)1; Wang ZF(王赵峰)1; Wang HG(王宏刚)1; Yang SR(杨生荣)1; Wang JQ(王金清); Wang HG(王宏刚)
The second department先进润滑与防护材料研究发展中心
2014
Source PublicationRSC Advances
ISSN2046-2069
Volume4Issue:12Pages:6060-6067
AbstractBased on the magic substance dopamine (DA), a simple and effective one-step solution deposition strategy has been developed for constructing high-performance amorphous zirconium oxide (ZrO2) nanocomposite thin film. DA can be auto-polymerized to form a polydopamine (PDA) coating, which adheres strongly to the silicon substrate and serves as an active platform to induce the subsequent deposition of ZrO2. The obtained ZrO2 nanocomposite thin films with the thickness of about one hundred nanometers presents outstanding mechanical and tribological performances even without a subsequent high-temperature annealing process. More importantly, the preparation process is definitely low-consumption and environmentally friendly. This work overcomes the claim that ZrO2 films obtained by aqueous solution deposition process generally possess low mechanical properties and thus avoid the defects of focusing mainly on nature and performances of heat-treated and crystalline ZrO2. Based on this work, it is believed that the as-deposited ZrO2 nanocomposite film can be widely used as a protecting coating and lubricating material for micro-and nano-electromechanical systems (MEMS/NEMS) and many other systems working in similar conditions.
Subject Area材料科学与物理化学
DOI10.1039/c3ra46169f
Funding Organizationthe National Natural Science Foundation of China (Grant nos. 51075384;51375474;51205385);the “Funds for Distinguished Young Scientists of Gansu Province” scheme
Indexed BySCI
If3.840
Language英语
Funding Project聚合物摩擦学组;复合润滑材料组
compositor第一作者单位
Citation statistics
Cited Times:31[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/6965
Collection固体润滑国家重点实验室(LSL)
中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心
Corresponding AuthorWang JQ(王金清); Wang HG(王宏刚)
Affiliation1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100080, Peoples R China
Recommended Citation
GB/T 7714
Mi YJ,Wang JQ,Yang ZG,et al. A simple one-step solution deposition process for constructing high-performance amorphous zirconium oxide thin film[J]. RSC Advances,2014,4(12):6060-6067.
APA Mi YJ.,Wang JQ.,Yang ZG.,Wang ZF.,Wang HG.,...&王宏刚.(2014).A simple one-step solution deposition process for constructing high-performance amorphous zirconium oxide thin film.RSC Advances,4(12),6060-6067.
MLA Mi YJ,et al."A simple one-step solution deposition process for constructing high-performance amorphous zirconium oxide thin film".RSC Advances 4.12(2014):6060-6067.
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