Vacuum tribological properties of a-C:H film in relation to internal stress and applied load
Department先进润滑与防护材料研究发展中心
Wu YX(吴艳霞)1,2; Li HX(李红轩)1; Ji L(吉利)1; Ye YP(冶银平)1; Chen JM(陈建敏)1; Zhou HD(周惠娣)1; Chen JM(陈建敏)
The second department固体润滑国家重点实验室
2014
Source PublicationTribology International
ISSN0301-679X
Volume71Pages:82-87
AbstractAmorphous hydrogenated carbon (a-C:H) films were deposited by medium frequency unbalanced magnetron sputteringwithAr/CH4 gases. The microstructure and vacuum tribological properties of the films in relation to internal stress and applied load (1, 2, 4 and 5 N) were investigated. The results show that the bonded hydrogen in the film decreases and the graphitization of the film increases with increasing Ar ratio in the source gases. Meanwhile, all the films have ultra-low friction coefficients (about 0.005) but relatively short sliding lifetimes (shorter than 900 s) in vacuum. Furthermore, the film can maintain a sliding lifetime longer than 3600 s either by lower the internal stress (annealed at 200 ℃) or sliding at a small applied load (1N). It has been found that relaxation of the internal stress is the main case of the short sliding lifetime in vacuum, where as it does not occur in air under the same tested conditions.
KeywordAmorphous Hydrogenated Carbon Film Vacuum Friction Internal Stress Applied Load
Subject Area材料科学与物理化学
DOI10.1016/j.triboint.2013.11.004
Funding Organizationthe National Natural Science Foundation of China (Grant No. 51275509;51175491);the 973 Project of China (No. 2013CB632300);the Chinese Academy of Science
Indexed BySCI
If1.936
Language英语
Funding Project磨损与表面工程课题组
compositor第一作者单位
Citation statistics
Cited Times:28[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/4509
Collection中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心
固体润滑国家重点实验室(LSL)
Corresponding AuthorChen JM(陈建敏)
Affiliation1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
Recommended Citation
GB/T 7714
Wu YX,Li HX,Ji L,et al. Vacuum tribological properties of a-C:H film in relation to internal stress and applied load[J]. Tribology International,2014,71:82-87.
APA Wu YX.,Li HX.,Ji L.,Ye YP.,Chen JM.,...&陈建敏.(2014).Vacuum tribological properties of a-C:H film in relation to internal stress and applied load.Tribology International,71,82-87.
MLA Wu YX,et al."Vacuum tribological properties of a-C:H film in relation to internal stress and applied load".Tribology International 71(2014):82-87.
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