Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering | |
Department | 先进润滑与防护材料研究发展中心 |
Wu YX(吴艳霞)1,2; Chen JM(陈建敏)1; Li HX(李红轩)1; Ji L(吉利)1; Ye YP(冶银平)1; Zhou HD(周惠娣)1; Chen JM(陈建敏); Li HX(李红轩) | |
The second department | 固体润滑国家重点实验室 |
2013 | |
Source Publication | Applied Surface Science |
ISSN | 0169-4332 |
Volume | 284Pages:165-170 |
Abstract | Silver (Ag)/diamond-like carbon (DLC) nanocomposite films with different Ag concentrations ranging from 0 to 11.02 at.% were prepared by medium frequency unbalanced magnetron sputtering, in which the mixed Ar/CH4 of different volume ratios were used as the source gases. The doping effects of Ag concentration on microstructure, mechanical and vacuum tribological properties of the DLC films were investigated. It is found that the Ag concentration increased with the increasing Ar/CH4 ratios, accompanied with the increasing number and size of Ag crystalline. With moderate incorporation of Ag at 3.55 at.%, the film (deposited at the Ar/CH4 = 65/45) maintained a low internal stress without considerable decrease of hardness and thus improved the adhesion strength. Moreover, the film showed low friction coefficient and the longest sliding lifetime in vacuum. The significant improvement in tribological properties of Ag/DLC nanocomposite films with moderate Ag concentration can be attributed to the low shear strength of Ag clusters on the surface, as well as the diffusion of Ag from the bulk to the surface and wear track. |
Keyword | Diamond-like Carbon (Dlc) Silver Incorporation Microstructure Mechanical Properties Tribological Properties |
Subject Area | 材料科学与物理化学 |
DOI | 10.1016/j.apsusc.2013.07.074 |
Funding Organization | the National Natural Science Foundation of China (Grant Nos. 51275509;51175491);the 973 Project of China (No. 2013CB632300);the Chinese Academy of Science |
Indexed By | SCI |
If | 2.538 |
Language | 英语 |
Funding Project | 磨损与表面工程课题组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/4465 |
Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室(LSL) |
Corresponding Author | Chen JM(陈建敏); Li HX(李红轩) |
Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
Recommended Citation GB/T 7714 | Wu YX,Chen JM,Li HX,et al. Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering[J]. Applied Surface Science,2013,284:165-170. |
APA | Wu YX.,Chen JM.,Li HX.,Ji L.,Ye YP.,...&李红轩.(2013).Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering.Applied Surface Science,284,165-170. |
MLA | Wu YX,et al."Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering".Applied Surface Science 284(2013):165-170. |
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