| Improving the internal stress and wear resistance of DLC film by low content Ti doping | |
| Department | 固体润滑国家重点实验室 |
Qiang L(强力) ; Zhang B(张斌); Zhou Y(周妍); Zhang JY(张俊彦); Zhang JY(张俊彦)
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| 2013 | |
| Source Publication | Solid State Sciences
 |
| ISSN | 1293-2558 |
| Volume | 20Pages:17-22 |
| Abstract | Low concentration Ti-doped hydrogenated amorphous carbon (Ti-C: H) films were deposited on silicon wafers by middle frequency magnetron sputtering titanium twin-targets in the feed gas of Ar/CH4. Ti concentration was controlled by varying the gas flow ratio of Ar/CH4 to be in the range of about 0.2-0.4 at.%. X-ray photoelectron spectroscopy (XPS), Raman and high-resolution transmission electron microscope (HRTEM) were used to analyze the composition and microstructure of the films. The internal stress, mechanical and tribological properties of the films were investigated by BGS 6341 type film stress tester, nanoindentation and reciprocating ball-on-disk tribo-tester, respectively. The results indicated that the incorporated Ti probably presents in the form of atomic state since no TiC was observed. The introduction of low content Ti significantly reduced the internal stress of DLC films with slight sacrifice of the hardness, and no obvious change was observed for the internal stress and hardness as the Ti content varies in the range of 0.2e0.42 at.%. Moreover, the low content Ti incorporation enhanced the friction and wear resistance of the DLC films dramatically with wear rate of ～10_8 mm3/Nm and friction coefficient of 0.04. That is, no matter how much is Ti doping amount, the DLC film has excellent properties as long as the amount of Ti doping reaches the low content level. |
| Keyword | Diamond-like Carbon Film Low ConcentraTion Ti Doping Stress Wear Resistance |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.solidstatesciences.2013.03.003 |
| Funding Organization | the National Natural Science Foundation of China (Grant Nos. 51275508;51205383);the Ministry of Science and Technology of China (Grant no. 2010DFA63610);the 973 program 2013CB632300 |
| Indexed By | SCI |
| If | 1.679 |
| Language | 英语 |
| Funding Project | 纳米润滑研究组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/4294 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Zhang JY(张俊彦) |
| Affiliation | Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
| Recommended Citation GB/T 7714 | Qiang L,Zhang B,Zhou Y,et al. Improving the internal stress and wear resistance of DLC film by low content Ti doping[J]. Solid State Sciences,2013,20:17-22. |
| APA | Qiang L,Zhang B,Zhou Y,Zhang JY,&张俊彦.(2013).Improving the internal stress and wear resistance of DLC film by low content Ti doping.Solid State Sciences,20,17-22. |
| MLA | Qiang L,et al."Improving the internal stress and wear resistance of DLC film by low content Ti doping".Solid State Sciences 20(2013):17-22. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 强力文章.pdf（1136KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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