Study on the microstructure and properties of graphite-like carbon films deposited by unbalanced magnetron sputtering | |
Department | 先进润滑与防护材料研究发展中心 |
Wang YJ(王永军)1,2; Li HX(李红轩)1; Ji L(吉利)1; Zhao F(赵飞)3; Li J(李健)1,2; Liu XH(刘晓红)1; Wu YX(吴艳霞)1,2; Lv YH(吕艳红)1,2; Fu YY(付英英)1,2; Zhou HD(周惠娣)1; Chen JM(陈建敏)1; Chen JM(陈建敏) | |
The second department | 固体润滑国家重点实验室 |
2012 | |
Source Publication | Proceedings of the Institution of Mechanical Engineers, Part J:Journal of Engineering Tribology |
ISSN | 1350-6501 |
Volume | 226Issue:J8Pages:714-721 |
Abstract | A series of graphite-like amorphous carbon films were deposited by unbalanced magnetron sputtering system with different sputtering currents. The microstructure, morphology, contact angle, and tribological properties of the resultant carbon films were subsequently investigated by means of different characterization techniques. Raman analysis shows that the resultant amorphous carbon films are dominated by sp2 sites, and the intensity ratio of the D and G peaks increases gradually from ∼4.1 to ∼5.4 with decrease in the sputtering current from 16 to 4 A, which is one order of magnitude larger than that of diamond-like carbon films with high sp3 content, indicating a more graphite-like structure. The surface of the resulting carbon films is composed of granular structure with different diameters and heights, and the root mean square roughness of the studied films monotonically increases from 3.5 nm at a sputtering current of 4 A to 8.2 nm at 16 A. The contact angle of graphite-like carbon films with water changes from 43.4° to 89.5° with decrease in the sputtering current. Besides, these graphite-like carbon films demonstrate superior tribological properties with high load-bearing capacity and low friction coefficient in humid atmosphere. The superior tribological behaviors of this graphite-like carbon film are promising for a wide range of applications such as gears, cutting tools, automobile parts, etc. |
Keyword | Graphite-like Carbon Film Magnetron Sputtering Microstructure Tribological Properties Contact Angle |
Subject Area | 材料科学与物理化学 |
DOI | 10.1177/1350650112437508 |
Funding Organization | the China National Natural Science Foundation of China (grant no. 50705093);the Innovative Group Foundation from NSFC (grant no.50421502);the National 973 Project (no. 2007CB607601) |
Indexed By | SCI |
If | 0.631 |
Language | 英语 |
Funding Project | 磨损和表面工程组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/3437 |
Collection | 固体润滑国家重点实验室(LSL) 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
Corresponding Author | Chen JM(陈建敏) |
Affiliation | 1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, People’s Republic of China 2.Graduate University of the Chinese Academy of Sciences, People’s Republic of China 3.School of Materials Science and Engineering, Henan University of Science and Technology, People’s Republic of China |
Recommended Citation GB/T 7714 | Wang YJ,Li HX,Ji L,et al. Study on the microstructure and properties of graphite-like carbon films deposited by unbalanced magnetron sputtering[J]. Proceedings of the Institution of Mechanical Engineers, Part J:Journal of Engineering Tribology,2012,226(J8):714-721. |
APA | Wang YJ.,Li HX.,Ji L.,Zhao F.,Li J.,...&陈建敏.(2012).Study on the microstructure and properties of graphite-like carbon films deposited by unbalanced magnetron sputtering.Proceedings of the Institution of Mechanical Engineers, Part J:Journal of Engineering Tribology,226(J8),714-721. |
MLA | Wang YJ,et al."Study on the microstructure and properties of graphite-like carbon films deposited by unbalanced magnetron sputtering".Proceedings of the Institution of Mechanical Engineers, Part J:Journal of Engineering Tribology 226.J8(2012):714-721. |
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714-721.PDF(550KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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