| Synthesis and characterization of titanium-containing graphite-like carbon films with low internal stress and superior tribological properties | |
| Department | 先进润滑与防护材料研究发展中心 |
Wang YJ(王永军)1,2; Li HX(李红轩)1 ; Ji L(吉利)1; Liu XH(刘晓红)1; Wu YX(吴艳霞)1,2; Lv YH(吕艳红)1,2; Fu YY(付英英)1,2; Zhou HD(周惠娣)2; Chen JM(陈建敏)1; Chen JM(陈建敏)
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| The second department | 固体润滑国家重点实验室 |
| 2012 | |
| Source Publication | Journal of physics D: Applied physics
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| ISSN | 0022-3727 |
| Volume | 45Issue:29Pages:295301(1-10) |
| Abstract | Titanium-containing graphite-like carbon films were deposited on silicon substrates by an unbalanced magnetron sputtering system. The effect of titanium concentration on the film microstructure and properties was subsequently investigated by means of different characterization techniques. It is found that the current carbon films have a graphite-like structure with some fine titanium carbide particles dispersed in an amorphous carbon matrix. With increasing titanium concentration from 0 at% to ~9.6 at%, the sp2 concentration in the film shows a slight increase, while the hardness of the carbon films decreases evidently when a small quantity of titanium (~2.9 at%) is introduced into the film structure, but it does not suffer an obvious change with further increase in titanium concentration until the titanium concentration is up to ~9.6 at%. The increased hardness of the film with a titanium concentration of about 9.6 at% is probably due to the formation of specified dimension titanium carbide crystals in the amorphous carbon matrix. All the current carbon films have low internal stress and rough surface, and the doping of titanium has little influence on their internal stress and root mean square roughness. The friction coefficient of the films decreases distinctly as the titanium concentration increases from 0 at% to ~9.6 at%, but the wear rate does not increase evidently until the titanium concentration exceeds over ~6.2 at% in air tests. The titanium-containing graphite-like carbon films show a stable friction coefficient and extremely low wear under oil lubricated conditions. The unique graphite-like structure, the high hardness and elastic modulus ratio (H/E) and the easy formation of a transfer film are mainly responsible for the superior tribological properties of the resulting titanium-containing graphite-like carbon films. |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1088/0022-3727/45/29/295301 |
| Funding Organization | the National Natural Science Foundation of China (Grant Nos 50705093;50575217);the Innovative Group Foundation from NSFC (Grant No 50421502);the National 973 Project (No 2007CB607601) |
| Indexed By | SCI |
| If | 2.528 |
| Language | 英语 |
| Funding Project | 磨损和表面工程组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/3384 |
| Collection | 固体润滑国家重点实验室（LSL） 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
| Corresponding Author | Chen JM(陈建敏) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| Recommended Citation GB/T 7714 | Wang YJ,Li HX,Ji L,et al. Synthesis and characterization of titanium-containing graphite-like carbon films with low internal stress and superior tribological properties[J]. Journal of physics D: Applied physics,2012,45(29):295301(1-10). |
| APA | Wang YJ.,Li HX.,Ji L.,Liu XH.,Wu YX.,...&陈建敏.(2012).Synthesis and characterization of titanium-containing graphite-like carbon films with low internal stress and superior tribological properties.Journal of physics D: Applied physics,45(29),295301(1-10). |
| MLA | Wang YJ,et al."Synthesis and characterization of titanium-containing graphite-like carbon films with low internal stress and superior tribological properties".Journal of physics D: Applied physics 45.29(2012):295301(1-10). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 295301.PDF（1476KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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