| Substrate-tilt angle effect on structural and optical properties of sputtered ZnO film | |
| Department | 固体润滑国家重点实验室 |
Pang HF(庞华峰)1,2; Zhang GA(张广安)3 ; Tang YL(唐永亮)1; Fu YQ(付永庆)2; Wang LP(王立平)3; Zu XT(祖小涛)1; Frank Placido2; Fu YQ(付永庆); Zu XT(祖小涛)
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| 2012 | |
| Source Publication | Applied Surface Science
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| ISSN | 0169-4332 |
| Volume | 259Pages:747-753 |
| Abstract | A new one-step method utilizing a special holder for a direct current magnetron sputtering system has enabled simultaneous deposition of ZnO films with different substrate tilt angles on quartz and silicon substrates. Observation from scanning electron microscopy shows that a typical columnar structure is obtained and the column inclination angle varies from 0◦to 34◦. From X-ray diffraction analysis, the strains in the ZnO films decrease with increasing substrate tilt angle, which is confirmed by the variation of the longitude optical phonon vibration in the Raman spectra. The band-gap energies decrease from 3.19 eV to 3.07 eV mainly due to the changes of strain relaxation induced by the defect variations in the films. Photoluminescence spectra revealed that the generation, type and concentration of the complex defects are influenced by the substrate tilt angle. |
| Keyword | Sputtered Zno Film Substrate Tilt Angle Band-gap Energy Photoluminescence New One-step Method |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.apsusc.2012.07.114 |
| Funding Organization | the Fundamental Research Fundsfor the Central Universities (ZYGX2009J046;ZYGX2009X007);the Sichuan Young Scientists Foundation (2010JQ0006);the Royal Society-Research Grant (RG090609);Carnegie Trust Funding, RoyalSociety of Edinburgh;Royal Academy of Engineering-Research Exchanges with China and India Awards |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 低维材料摩擦学组 |
| compositor | 第三作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/3292 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Fu YQ(付永庆); Zu XT(祖小涛) |
| Affiliation | 1.Univ Elect Sci & Technol China, Dept Appl Phys, Chengdu 610054, Peoples R China 2.Univ W Scotland, SUPA, Thin Film Ctr, Paisley PA1 2BE, Renfrew, Scotland 3.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
| Recommended Citation GB/T 7714 | Pang HF,Zhang GA,Tang YL,et al. Substrate-tilt angle effect on structural and optical properties of sputtered ZnO film[J]. Applied Surface Science,2012,259:747-753. |
| APA | Pang HF.,Zhang GA.,Tang YL.,Fu YQ.,Wang LP.,...&祖小涛.(2012).Substrate-tilt angle effect on structural and optical properties of sputtered ZnO film.Applied Surface Science,259,747-753. |
| MLA | Pang HF,et al."Substrate-tilt angle effect on structural and optical properties of sputtered ZnO film".Applied Surface Science 259(2012):747-753. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 747-753.PDF（1448KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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