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Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a‐C:H:Ti/a‐C:H friction pairs
Department中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心
Wen, Xinyu; Lai, Zhenguo; Zhang, Bin
The second department纳米润滑中心607
2022
Source PublicationSURFACE AND INTERFACE ANALYSIS
Volume54Issue:9Pages:933-943
Abstract

 

In this study, we prepared a-C:H films with different nanostructures at different methane flow rates. The effect of the methane flow rate on the tribological properties of 440 steel/a-C:H friction pairs and a-C:H:Ti/a-C:H friction pairs in an atmospheric environment was studied by a reciprocating friction machine. The results show that there is no relationship between the tribological properties of 440 steel/aC:H friction pair and methane flow rate. The tribological performance of the a-C:H: Ti/a-C:H friction pair was greatly improved. In particular, in the friction pair of a-C:H: Ti/a-C:H with a methane flow rate of 20 sccm, superlubricity is shown, and the wear rate is only 4.04  109 mm3 /Nm. After tribological experiments, Raman spectroscopy, XPS, and other characterization methods were used to study the relationship between the nanostructure and tribological properties of a-C:H:Ti films and a-C:H prepared with different methane flow rates. This study is great significance to the application of a-C:H:Ti/a-C:H friction pair in mechanical parts under atmospheric environment

KeywordDLC/DLC pair friction hydrogenated amorphous carbon films hydrogenated carbon ball
If1.9
Language中文
compositor第一作者单位
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/30505
Collection固体润滑国家重点实验室(LSL)
中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心
AffiliationState Key Laboratory of Solid Lubrication
Recommended Citation
GB/T 7714
Wen, Xinyu,Lai, Zhenguo,Zhang, Bin. Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a‐C:H:Ti/a‐C:H friction pairs[J]. SURFACE AND INTERFACE ANALYSIS,2022,54(9):933-943.
APA Wen, Xinyu,Lai, Zhenguo,&Zhang, Bin.(2022).Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a‐C:H:Ti/a‐C:H friction pairs.SURFACE AND INTERFACE ANALYSIS,54(9),933-943.
MLA Wen, Xinyu,et al."Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a‐C:H:Ti/a‐C:H friction pairs".SURFACE AND INTERFACE ANALYSIS 54.9(2022):933-943.
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