| Optimization of sputter-deposited corrosion resistant a-C(:H) films with excellent tribological performance by control of methane flow rate | |
| Department | 固体润滑国家重点实验室（LSL） |
Cong Wang1,2; Cunxiu Zhang1,3; Dewen Niu1,3; Jian Kang1,3; Yan Lu1,3; Junying Hao1,2,3
| |
| The second department | 润滑与防护薄膜课题组 |
| 2022 | |
| Source Publication | Thin Solid Films
 |
| Issue | 763Pages:Thin Solid Films |
| If | 2.358 |
| compositor | 第一作者单位 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/29818 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Yan Lu; Junying Hao |
| Affiliation | 1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Science, Lanzhou 730000, China 2.b Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China 3.Qingdao Center of Resource Chemistry and New Materials, Qingdao 266000, China |
| Recommended Citation GB/T 7714 | Cong Wang,Cunxiu Zhang,Dewen Niu,et al. Optimization of sputter-deposited corrosion resistant a-C(:H) films with excellent tribological performance by control of methane flow rate[J]. Thin Solid Films,2022(763):Thin Solid Films. |
| APA | Cong Wang,Cunxiu Zhang,Dewen Niu,Jian Kang,Yan Lu,&Junying Hao.(2022).Optimization of sputter-deposited corrosion resistant a-C(:H) films with excellent tribological performance by control of methane flow rate.Thin Solid Films(763),Thin Solid Films. |
| MLA | Cong Wang,et al."Optimization of sputter-deposited corrosion resistant a-C(:H) films with excellent tribological performance by control of methane flow rate".Thin Solid Films .763(2022):Thin Solid Films. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| wangcong2.pdf（11359KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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