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Plasma surface pretreatment to improve interfacial adhesion strengths of sputtered Cu on polyimide film
Department固体润滑国家重点实验室(LSL)
Enze Wang1,2; Yutao Song1; Lunlin Shang1; Guangan Zhang1; Shunhua Wang2
The second department低维润滑材料组
2022-10-19
Source PublicationSurface Topography: Metrology and Properties
Issue10Pages:045005
If2.185
Language英语
compositor第一作者单位
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/29450
Collection固体润滑国家重点实验室(LSL)
Corresponding AuthorLunlin Shang; Guangan Zhang
Affiliation1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences
2.School of Materials Science and Engineering, Lanzhou Jiaotong University
Recommended Citation
GB/T 7714
Enze Wang,Yutao Song,Lunlin Shang,et al. Plasma surface pretreatment to improve interfacial adhesion strengths of sputtered Cu on polyimide film[J]. Surface Topography: Metrology and Properties,2022(10):045005.
APA Enze Wang,Yutao Song,Lunlin Shang,Guangan Zhang,&Shunhua Wang.(2022).Plasma surface pretreatment to improve interfacial adhesion strengths of sputtered Cu on polyimide film.Surface Topography: Metrology and Properties(10),045005.
MLA Enze Wang,et al."Plasma surface pretreatment to improve interfacial adhesion strengths of sputtered Cu on polyimide film".Surface Topography: Metrology and Properties .10(2022):045005.
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