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C2H2/Ar 流量比对 a-C:H 涂层结构及摩擦学性能的影响
Department固体润滑国家重点实验室(LSL)
闫明明1,2; 剡珍1,3; 王新宇1,2; 鲁晓龙1,3; 随旭东1,3; 郝俊英1; 刘维民1
The second department润滑与防护薄膜课题组
2022-05
Source Publication摩擦学学报
Volume42Issue:3Pages:588-597
If1.258
Language中文
compositor第一作者单位
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/29163
Collection固体润滑国家重点实验室(LSL)
Corresponding Author郝俊英
Affiliation1.中国科学院兰州化学物理研究所 固体润滑国家重点实验室 , 甘肃 兰州 730000
2.中国科学院大学, 北京 100049
3.青岛市资源化学与新材料研究中心, 山东 青岛 266000
Corresponding Author AffilicationLanzhou Institute of Chemical Physics,Chinese Academy of Sciences
Recommended Citation
GB/T 7714
闫明明,剡珍,王新宇,等. C2H2/Ar 流量比对 a-C:H 涂层结构及摩擦学性能的影响[J]. 摩擦学学报,2022,42(3):588-597.
APA 闫明明.,剡珍.,王新宇.,鲁晓龙.,随旭东.,...&刘维民.(2022).C2H2/Ar 流量比对 a-C:H 涂层结构及摩擦学性能的影响.摩擦学学报,42(3),588-597.
MLA 闫明明,et al."C2H2/Ar 流量比对 a-C:H 涂层结构及摩擦学性能的影响".摩擦学学报 42.3(2022):588-597.
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