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Effects of heavy ion irradiation on Cu/Al2O3/Pt CBRAM devices
Department固体润滑国家重点实验室(LSL)
Chaohui Su1; Linbo Shan1; Dongliang Yang1; Yanfei Zhao1; Yujun Fu1; Jiande Liu1,2; Guangan Zhang3; Qi Wang1; Deyan He1
The second department低维润滑材料组
2021-07-27
Source PublicationMicroelectronic Engineering
Issue247Pages:111600
If2.523
compositor第三作者单位
Citation statistics
Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/28010
Collection固体润滑国家重点实验室(LSL)
Corresponding AuthorQi Wang
Affiliation1.School of Physical Science and Technology, Lanzhou University
2.Institute of Modern Physics, Chinese Academy of Sciences
3.Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemicals Physics, Chinese Academy of Sciences
Recommended Citation
GB/T 7714
Chaohui Su,Linbo Shan,Dongliang Yang,et al. Effects of heavy ion irradiation on Cu/Al2O3/Pt CBRAM devices[J]. Microelectronic Engineering,2021(247):111600.
APA Chaohui Su.,Linbo Shan.,Dongliang Yang.,Yanfei Zhao.,Yujun Fu.,...&Deyan He.(2021).Effects of heavy ion irradiation on Cu/Al2O3/Pt CBRAM devices.Microelectronic Engineering(247),111600.
MLA Chaohui Su,et al."Effects of heavy ion irradiation on Cu/Al2O3/Pt CBRAM devices".Microelectronic Engineering .247(2021):111600.
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