中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心知识库

NiFe alloy microcomponents are widely used in electromagnetic devices and microelectromechanical systems
due to high saturation magnetization and low coercivity. In this paper, freestanding Ni75Fe25 microcomponents
are fabricated by both microelectroforming and micromolding. The microstructure, microhardness, and magnetic
property of Ni75Fe25 microcomponents fabricated by the two methods are systematically investigated. The
microstructure is characterized by X-ray diffraction, transmission electron microscopy, and electron backscatter
diffraction. The magnetic property is examined by a vibrating sample magnetometer. The formability of those
two methods is evaluated by the minimum feature size and maximum aspect ratio that can be achieved. The
results show that nanocrystalline and microcrystalline Ni75Fe25 microcomponents with a FCC Ni3Fe phase are
fabricated by microelectroforming and micromolding, respectively. Compared with micromolded Ni75Fe25
microcomponents, microelectroformed ones have higher dimensional precision, lower surface roughness, greater
microhardness, and higher saturation magnetization because of the nanosized grains, whereas micromolded
Ni75Fe25 microcomponents have smaller feature size, larger aspect ratio, and lower coercivity.