Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties | |
Department | 固体润滑国家重点实验室(LSL) |
Jiao Xu1,2; Li Qiao1; Zewen Duan1; Dengji Guo1; Liqiang Chai1; Xiaoyu Zhao1; Peng Wang1; Weimin Liu1 | |
The second department | 辐照与核环境摩擦学组 |
2020-04 | |
Source Publication | surface and interface analysis |
Issue | -Pages:- |
Indexed By | SCI |
If | 1.6 |
compositor | 第一作者单位 |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/26908 |
Collection | 固体润滑国家重点实验室(LSL) |
Corresponding Author | Peng Wang |
Affiliation | 1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences 2.Institute of Semiconductor Manufacturing Research, Shenzhen University |
Recommended Citation GB/T 7714 | Jiao Xu,Li Qiao,Zewen Duan,et al. Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties[J]. surface and interface analysis,2020(-):-. |
APA | Jiao Xu.,Li Qiao.,Zewen Duan.,Dengji Guo.,Liqiang Chai.,...&Weimin Liu.(2020).Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties.surface and interface analysis(-),-. |
MLA | Jiao Xu,et al."Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties".surface and interface analysis .-(2020):-. |
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2020XuDLC.pdf(26789KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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