LICP OpenIR  > 固体润滑国家重点实验室(LSL)
Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties
Department固体润滑国家重点实验室(LSL)
Jiao Xu1,2; Li Qiao1; Zewen Duan1; Dengji Guo1; Liqiang Chai1; Xiaoyu Zhao1; Peng Wang1; Weimin Liu1
The second department辐照与核环境摩擦学组
2020-04
Source Publicationsurface and interface analysis
Issue-Pages:-
Indexed BySCI
If1.6
compositor第一作者单位
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/26908
Collection固体润滑国家重点实验室(LSL)
Corresponding AuthorPeng Wang
Affiliation1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences
2.Institute of Semiconductor Manufacturing Research, Shenzhen University
Recommended Citation
GB/T 7714
Jiao Xu,Li Qiao,Zewen Duan,et al. Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties[J]. surface and interface analysis,2020(-):-.
APA Jiao Xu.,Li Qiao.,Zewen Duan.,Dengji Guo.,Liqiang Chai.,...&Weimin Liu.(2020).Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties.surface and interface analysis(-),-.
MLA Jiao Xu,et al."Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties".surface and interface analysis .-(2020):-.
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