Thermal stability of Pt-Ti bilayer films annealing in vacuum and ambient atmosphere | |
Department | 固体润滑国家重点实验室 |
Weng, Sizhe1,2; Qiao L(乔丽)2,3; Wang P(王鹏)2; Wang P(王鹏) | |
2018 | |
Source Publication | Applied Surface Science |
ISSN | 0169-4332 |
Volume | 444Pages:721-728 |
Abstract | The thermal stability of platinum/titanium bilayer film dominates the performance when the film electrodes operate under extreme conditions, such as high temperature. In this study, a platinum/titanium bilayer film deposited by magnetron sputtering was used as a model system to study the influence of annealing in vacuum and ambient atmosphere on structural and electrical resistivity changes. The results show that in both cases blow 773 K annealing the metal platinum is the dominant phase, the alloying and the diffusion happen only at the interface of Pt and Ti. Two different structural evolutions set in when the temperature above 873 K, in vacuum an alloying process promotes with increasing of annealing temperature and metal Pt phase transforms to TiPt8 and finally to TiPt3 compounds, which leads to the increase of electrical resistivity. In ambient atmosphere annealing, when titanium diffused out to the surface of film, the oxidation reaction between titanium and oxygen suppresses the alloying process between platinum and titanium, in this case the metal Pt phase remains in the film and starts to agglomerate, defects such as grain boundary and voids in film reduced due to the recrystallization, results in the reduction of electrical resistivity. |
Keyword | Platinum Titanium Bilayer Films Interface Electrical Resistivity |
Subject Area | 材料科学与物理化学 |
DOI | 10.1016/j.apsusc.2018.03.095 |
Funding Organization | the National Natural Science Foundation of China (Grant No. 11475236) |
Indexed By | SCI |
Language | 英语 |
Funding Project | 辐照环境下润滑与防护材料组 |
compositor | 第二作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/23618 |
Collection | 固体润滑国家重点实验室(LSL) |
Corresponding Author | Wang P(王鹏) |
Affiliation | 1.School of Physical Science and Technology, Lanzhou University, 730000 Lanzhou, PR China 2.Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
Recommended Citation GB/T 7714 | Weng, Sizhe,Qiao L,Wang P,et al. Thermal stability of Pt-Ti bilayer films annealing in vacuum and ambient atmosphere[J]. Applied Surface Science,2018,444:721-728. |
APA | Weng, Sizhe,Qiao L,Wang P,&王鹏.(2018).Thermal stability of Pt-Ti bilayer films annealing in vacuum and ambient atmosphere.Applied Surface Science,444,721-728. |
MLA | Weng, Sizhe,et al."Thermal stability of Pt-Ti bilayer films annealing in vacuum and ambient atmosphere".Applied Surface Science 444(2018):721-728. |
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1-s2.0-S016943321830(3811KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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