Self-organized formation of nano-multilayer structure in the carbon-copper thin film during reactive magnetron sputtering deposition process | |
Department | 先进润滑与防护材料研究发展中心 |
Wang WQ(王伟奇)1,2; Ji L(吉利)1; Li HX(李红轩)1; Zhou HD(周惠娣)1; Chen JM(陈建敏)1; Li HX(李红轩); Ji L(吉利) | |
The second department | 固体润滑国家重点实验室 |
2017 | |
Source Publication | Journal of Alloys and Compounds |
ISSN | 0925-8388 |
Volume | 722Pages:242-249 |
Abstract | Fabrication of Nano-multilayered structure film is often complex owing to its fabricated process which needs to regulate a certain deposition parameter periodically. Here, we demonstrated a self-organized nano-multilayered structure in carbon-copper thin films only using one single sputtering target of copper in a conventional DC reactive sputtering deposition process. The influence of methane concentration on the microstructure, especially on the self-organized nano-multilayer, of the films were investigated by X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, field emission scanning electron microscopy (FESEM) and high-resolution transmission electron microscopy (HRTEM). The results showed that the film deposited at low methane concentration was consisted of disorder copper grains with higher copper content. With increasing methane concentration, the copper content in the films decreased and the film structure was gradually transformed to a self-organized nano-multilayered structure consisting of alternating carbon and copper nanolayers. Based on (a) the effect of carbon adsorbed on the copper target leading to target poisoning, (b) the influence of copper grain size and crystallinity orientations on surface roughness of interface between carbon-rich and copper-rich layer and (c) the low energy ion bombardment enhanced inter diffusion, the mechanism of self-organized formation of nano-multilayer in the carbon-copper thin films was proposed. |
Keyword | Nano-multilayers Self-organized Carbon-copper Films Reactive Magnetron Sputter |
Subject Area | 材料科学与物理化学 |
DOI | 10.1016/j.jallcom.2017.06.006 |
Funding Organization | the national 973 program of China (No. 2013CB632302);the National Natural Science Foundation of China, (Grant No. 51472250;No. 51405474;No. U1637204);the program of the Light of the Chinese Academy of Science in china's Western Region (2015);the Chinese Academy of Science and its Youth Innovation Promotion Association(2016368) |
Indexed By | SCI |
If | 3.133 |
Language | 英语 |
Funding Project | 磨损与表面工程研究组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/22422 |
Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室(LSL) |
Corresponding Author | Li HX(李红轩); Ji L(吉利) |
Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100081, Peoples R China |
Recommended Citation GB/T 7714 | Wang WQ,Ji L,Li HX,et al. Self-organized formation of nano-multilayer structure in the carbon-copper thin film during reactive magnetron sputtering deposition process[J]. Journal of Alloys and Compounds,2017,722:242-249. |
APA | Wang WQ.,Ji L.,Li HX.,Zhou HD.,Chen JM.,...&吉利.(2017).Self-organized formation of nano-multilayer structure in the carbon-copper thin film during reactive magnetron sputtering deposition process.Journal of Alloys and Compounds,722,242-249. |
MLA | Wang WQ,et al."Self-organized formation of nano-multilayer structure in the carbon-copper thin film during reactive magnetron sputtering deposition process".Journal of Alloys and Compounds 722(2017):242-249. |
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