| Nanotribological properties of precision-controlled regular nanotexture on H-passivated Si surface by current-induced local anodic oxidation | |
| Department | 固体润滑国家重点实验室 |
| Mo YF(莫宇飞); Zhao WJ(赵文杰); Huang DM(黄德明); Zhao F(赵飞); Bai MW(白明武) | |
| 2009 | |
| Source Publication | Ultramicroscopy
 |
| ISSN | 0304-3991 |
| Volume | 109Pages:247-252 |
| Abstract | Nano-sized textures resulted from localized electrochemical oxidation by using atomic force microscopy (AFM) were fabricated on H-passivated Si surface. In this paper, the fabrication and nanotribological properties of nanotexture by local anodic oxidation (LAO) on H-passivated Si surface are presented. A special attention is paid to find the relation between the size of oxide nanotexture and operational parameters such as tip-sample pulsed bias voltage, pulsewidth, and relative humidity to fabricate oxide nanotexture. The nanotribological properties were investigated by a colloidal probe. The results indicate that the nanotextures exhibited low adhesion and greatly reduced friction force at nanometer scale. |
| Keyword | Nanotexture Local Anodic Oxidation Atomic Force Microscopy Nanotribology |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China under Grant no. 50675217;National 973 Program: 2007CB607601 |
| Indexed By | SCI |
| Language | 英语 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2152 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Bai MW(白明武) |
| Recommended Citation GB/T 7714 | Mo YF,Zhao WJ,Huang DM,et al. Nanotribological properties of precision-controlled regular nanotexture on H-passivated Si surface by current-induced local anodic oxidation[J]. Ultramicroscopy,2009,109:247-252. |
| APA | 莫宇飞,赵文杰,黄德明,赵飞,&白明武.(2009).Nanotribological properties of precision-controlled regular nanotexture on H-passivated Si surface by current-induced local anodic oxidation.Ultramicroscopy,109,247-252. |
| MLA | 莫宇飞,et al."Nanotribological properties of precision-controlled regular nanotexture on H-passivated Si surface by current-induced local anodic oxidation".Ultramicroscopy 109(2009):247-252. |
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| 2009247-252.PDF（1020KB） | 开放获取 | License | View Application Full Text | |||
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