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Formation of hydrogenated amorphous carbon films containing fullerene-like structures
Department固体润滑国家重点实验室
Wang P(王鹏); Wang X(王霞); Zhang B(张斌); Liu WM(刘维民)
2009
Source PublicationJournal of Non-Crystalline Solids
ISSN0022-3093
Volume355Pages:1742-1746
AbstractHydrogenated amorphous carbon films containing fullerene-like structures were obtained by magnetron sputtering of a titanium target in methane and argon atmosphere. The microstructure of the film was investigated by transmission electron microscopy and Raman spectra. Additionally, the three stage model proposed by Ferrari and Robertson was used to explain the formation process of fullerene-like structures. The results show that titanium target was covered by a hydrocarbon layer, and the new-produced hydrocarbon layer on titanium target rather than the titanium surface was sputtered during deposition. The product of the sputtering can serve as ‘seeds’ for the formation of fullerene-like structures. These ‘seeds’ or nuclei are proposed to be open graphene structures, at the effect of ions bombardment, more defects are introduced and the curved structure arises due to incorporation of odd member rings into the graphene sheets, which resulted in the formation of curved planes with small radii of curvature and closed fullerene-like structure.
KeywordFilms And Coatings Sputtering Carbon
Subject Area材料科学与物理化学
Funding Organizationthe National Natural Science Foundation of China (Granted No: 50823008;50721062);973 projects (Grant No. 2007CB607601) of the Ministry of Science and Technology of China;the “Hundreds Talent Program” of the Chinese Academy of Sciences
Indexed BySCI
Language英语
Funding Project空间润滑材料组
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/2076
Collection固体润滑国家重点实验室(LSL)
Corresponding AuthorLiu WM(刘维民)
Recommended Citation
GB/T 7714
Wang P,Wang X,Zhang B,et al. Formation of hydrogenated amorphous carbon films containing fullerene-like structures[J]. Journal of Non-Crystalline Solids,2009,355:1742-1746.
APA 王鹏,王霞,张斌,&刘维民.(2009).Formation of hydrogenated amorphous carbon films containing fullerene-like structures.Journal of Non-Crystalline Solids,355,1742-1746.
MLA 王鹏,et al."Formation of hydrogenated amorphous carbon films containing fullerene-like structures".Journal of Non-Crystalline Solids 355(2009):1742-1746.
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