| Effects of pulse bias duty cycle on fullerenelike nanostructure and mechanical properties of hydrogenated carbon films prepared by plasma enhanced chemical vapor deposition method | |
| Department | 固体润滑国家重点实验室 ; 先进润滑与防护材料研究发展中心 |
Ji L(吉利) ; Li HX(李红轩); Zhao F(赵飞); Quan WL(权伟龙); Chen JM(陈建敏); Zhou HD(周惠娣)
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| 2009 | |
| Source Publication | Journal of Applied Phyics
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| ISSN | 0021-8979 |
| Volume | 105Pages:106113(1-3) |
| Abstract | Fullerenelike hydrogenated carbon films were produced by pulse bias-assisted rf inductively coupled plasma enhanced chemical vapor deposition ICPECVD . The effects of pulse duty cycle on the microstructure and mechanical properties of the resultant films were investigated by means of high resolution transmission electron microscopy HRTEM , Raman spectroscopy, nanoindentation, and stress measurement. The low pulse duty cycle was found the key in the formation of fullerenelike structure in hydrogenated carbon films, and thus increased the hardness, elasticity, and internal stress of the films. The role of pulse duty cycle in evolution of fullerenelike structure was also discussed in terms of ion bombardment, hydrogen removal, and “annealing” effects. |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (NSFC) (Nos. 50705093;50575217);the Innovative Group Fund from NSFC (No. 50421502);“973” Plan (No. 2007CB607601);the Fundamental Scientific Research of China (No. A1320060604) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 磨损与表面工程组 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2047 |
| Collection | 固体润滑国家重点实验室（LSL） 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
| Corresponding Author | Chen JM(陈建敏) |
| Recommended Citation GB/T 7714 | Ji L,Li HX,Zhao F,et al. Effects of pulse bias duty cycle on fullerenelike nanostructure and mechanical properties of hydrogenated carbon films prepared by plasma enhanced chemical vapor deposition method[J]. Journal of Applied Phyics,2009,105:106113(1-3). |
| APA | 吉利,李红轩,赵飞,权伟龙,陈建敏,&周惠娣.(2009).Effects of pulse bias duty cycle on fullerenelike nanostructure and mechanical properties of hydrogenated carbon films prepared by plasma enhanced chemical vapor deposition method.Journal of Applied Phyics,105,106113(1-3). |
| MLA | 吉利,et al."Effects of pulse bias duty cycle on fullerenelike nanostructure and mechanical properties of hydrogenated carbon films prepared by plasma enhanced chemical vapor deposition method".Journal of Applied Phyics 105(2009):106113(1-3). |
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| 2009106113.PDF（328KB） | 开放获取 | License | View Application Full Text | |||
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