Fabrication of highly conductive Ru/a-CNx:H composite films by anode deposit | |
Department | 固体润滑国家重点实验室 |
Yu YL(于元烈); Zhang B(张斌); Zhang JY(张俊彦) | |
2009 | |
Source Publication | Electrochemistry Communications |
ISSN | 1388-2481 |
Volume | 11Pages:772-775 |
Abstract | Ruthenium(0) composite hydrogenated amorphous carbon nitride (Ru/a-CNx:H) films were deposition on single crystal silicon (100) substrate by electrochemical deposition technique with acetonitrile as carbon source, and Ru3(CO)12 as dopant. In the deposited progress, the Si (100) acted as anode. The relative atomic ratio of Ru/N/C was about 0.28/0.33/1, and Ru nanocrystalline particles about 8 nm were homo- geneously dispersed into the amorphous carbon matrix. After doping Ru into a-CNx:H films, the conduc- tivity of the films were evidently improved and the resistivity drastically decrease from 108 Ω cm to about 100 Ω cm. |
Keyword | Ru/a-cnx:h Composite FIlms Anode Deposit Conductivity |
Subject Area | 材料科学与物理化学 |
Funding Organization | the National Natural Science Foundation of China (Grant No. 50572108;50721062);the “Hundreds Talent Program” of Chinese Academy of Sciences |
Indexed By | SCI |
Language | 英语 |
Funding Project | 纳米润滑研究组 |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/2040 |
Collection | 固体润滑国家重点实验室(LSL) |
Corresponding Author | Zhang JY(张俊彦) |
Recommended Citation GB/T 7714 | Yu YL,Zhang B,Zhang JY. Fabrication of highly conductive Ru/a-CNx:H composite films by anode deposit[J]. Electrochemistry Communications,2009,11:772-775. |
APA | 于元烈,张斌,&张俊彦.(2009).Fabrication of highly conductive Ru/a-CNx:H composite films by anode deposit.Electrochemistry Communications,11,772-775. |
MLA | 于元烈,et al."Fabrication of highly conductive Ru/a-CNx:H composite films by anode deposit".Electrochemistry Communications 11(2009):772-775. |
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