中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心知识库

A series of Cr_1−xAl_xN (where x denotes the atom fraction of Al in Cr_1−xAl_xN film) films with different Al contents have been deposited by unbalanced reactive magnetron sputtering technique. The chemical composition, microstructure, surface morphology, cross-sectional structure, mechanical properties, thermal stability and tribological properties of the deposited films were studied by means of different techniques. It is found that with the increase of Al doping, the Al atoms either substitute the Cr atoms or occupy the interstitial sites in the CrN crystal lattice firstly, and when the Al doping content exceeds the solid solubility, superfluous Al atoms then exist in the form of amorphous or nanocrystal state in the films. Meanwhile, the grain size becomes smaller, and the microstructure gets denser because the Al doping leads to multiple crystal orientations and inhibits the grain growth. The Al doping induced solid solution hardening and grain boundary effects contribute to the high hardness of CrAlN films, and the dense structure as well as interstitial solid solution of Al, which can block the diffusion channel, endows the CrAlN films good oxidation resistance. Besides, a small amount of free Al existing in the films is favorable to improve the thermal stability without obvious loss of hardness. Finally, the relatively high hardness and good thermal stability make the Cr_0.29Al_0.71N film has relatively good tribological properties than CrN film under a wide temperature range, which extends the operating temperature of the CrN films in some fields.