| Microstructure and mechanical properties of graphitic a-C:H:Si films | |
| Department | 先进润滑与防护材料研究发展中心 |
Zhao F(赵飞)1,2; Li HX(李红轩)1 ; Ji L(吉利)1; Wang YJ(王永军)1; Mo YF(莫宇飞)3; Quan WL(权伟龙)1; Kong QH(孔庆花)1; Wang YX(王永霞)1; Chen JM(陈建敏)1; Zhou HD(周惠娣)1; Chen JM(陈建敏)
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| The second department | 固体润滑国家重点实验室 |
| 2012 | |
| Source Publication | Surface and Coatings Technology
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| ISSN | 0257-8972 |
| Volume | 206Issue:16Pages:3467-3471 |
| Abstract | A series of graphitic a-C:H:Si films with different Si content were prepared by altering the sputtering current in a hybrid RF-PECVD and magnetron sputtering system. Microstructures and mechanical properties of them were characterized by IR, Raman, XPS, nanoindentation and scratch tests. Results show that although the sp3/sp2 ratio increases with increasing Si content and as high as 8.2 at.% of silicon was doped, the a-C:H:Si films remain graphitic in nature and the ID/IG ratio is nearly constant for all. The coupling effects of sputtering-induced heating and strong ion bombarding due to negatively biasing were considered to be responsible for the film graphitization. The graphitic nature also accounts for the lower nanohardness of prepared a-C:H:Si films than the diamond-like a-C:H and a-C:H:Si films. |
| Keyword | Graphitic Carbon Film Si-doped Xps Raman |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.surfcoat.2012.02.013 |
| Funding Organization | the National Natural Science Foundation of China (Grant No.50705093;No.50575217);the Innovative Group Foundation from NSFC (Grant No.50421502);the National 973 Project (No.2007 CB607601) |
| Indexed By | SCI |
| If | 1.941 |
| Language | 英语 |
| Funding Project | 磨损与表面工程课题组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/19541 |
| Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Chen JM(陈建敏) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Henan Univ Sci & Technol, Sch Mat Sci & Engn, Luoyang, Peoples R China 3.Guangxi Univ, Sch Chem & Chem Engn, Nanning 530004, Peoples R China |
| Recommended Citation GB/T 7714 | Zhao F,Li HX,Ji L,et al. Microstructure and mechanical properties of graphitic a-C:H:Si films[J]. Surface and Coatings Technology,2012,206(16):3467-3471. |
| APA | Zhao F.,Li HX.,Ji L.,Wang YJ.,Mo YF.,...&陈建敏.(2012).Microstructure and mechanical properties of graphitic a-C:H:Si films.Surface and Coatings Technology,206(16),3467-3471. |
| MLA | Zhao F,et al."Microstructure and mechanical properties of graphitic a-C:H:Si films".Surface and Coatings Technology 206.16(2012):3467-3471. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 1-s2.0-S025789721200（592KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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