Controllable preparation of fluorine-containing fullerene-like carbon film | |
Department | 先进润滑与防护材料研究发展中心 |
Wang J(汪佳)1,2; Liang AM(梁爱民)1; Wang FG(王富国)1; Xu LH(徐龙华)3; Zhang JY(张俊彦)1; Wang FG(王富国); Zhang JY(张俊彦) | |
The second department | 固体润滑国家重点实验室 |
2016 | |
Source Publication | Applied Surface Science |
ISSN | 0169-4332 |
Volume | 370Pages:291-296 |
Abstract | Fluorine-containing fullerene-like carbon (F-FLC) films were prepared by high frequency unipolar pulse plasma-enhanced chemical vapor deposition. The microstructures, mechanical properties as well as the tribological properties of the films were investigated. The results indicate that fullerene-like microstructures appear in amorphous carbon matrix and increase greatly with the increase of bias voltage from −600 to −1600 V. And the fluorine contents in F-FLC films also show a minor rise. In addition, the hardness enhances with the bias voltage and the outstanding elastic recovery maintains because of the formation of fullerene-like microstructures in the F-FLC films. Undoubtedly, the F-FLC film deposited under high bias voltage owns a superiorly low friction, which combines the merits of fluorinated carbon film and fullerene-like carbon film. Moreover, the film also shows a remarkable wear resistance, which is mainly attributed to the excellent mechanical properties. This study provides new insights for us to prepare fluorine-containing FLC films with good mechanical and tribological properties. |
Keyword | F-flc Film Bias Voltage Microstructure Mechanical Properties Tribological Properties |
Subject Area | 材料科学与物理化学 |
DOI | 10.1016/j.apsusc.2016.02.171 |
Funding Organization | the Major State Basic Research Development Program of China (973 Program) (No. 2013CB632304) |
Indexed By | SCI |
If | 3.387 |
Language | 英语 |
Funding Project | 纳米润滑研究组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/19460 |
Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室(LSL) |
Corresponding Author | Wang FG(王富国); Zhang JY(张俊彦) |
Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Lanzhou Univ, Sch Stomatol, Lanzhou 730000, Peoples R China |
Recommended Citation GB/T 7714 | Wang J,Liang AM,Wang FG,et al. Controllable preparation of fluorine-containing fullerene-like carbon film[J]. Applied Surface Science,2016,370:291-296. |
APA | Wang J.,Liang AM.,Wang FG.,Xu LH.,Zhang JY.,...&张俊彦.(2016).Controllable preparation of fluorine-containing fullerene-like carbon film.Applied Surface Science,370,291-296. |
MLA | Wang J,et al."Controllable preparation of fluorine-containing fullerene-like carbon film".Applied Surface Science 370(2016):291-296. |
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