| Recent advances in the mechanical and tribological properties of fluorine-containing DLC films | |
| Department | 先进润滑与防护材料研究发展中心 |
Zhang LF(张礼芳)1,2 ; Wang FG(王富国)1; Qiang L(强力)1; Gao KX(高凯雄)1; Zhang B(张斌)1; Zhang JY(张俊彦)1; Zhang JY(张俊彦); Zhang B(张斌)
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| The second department | 固体润滑国家重点实验室 |
| 2015 | |
| Source Publication | RSC Advances
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| ISSN | 2046-2069 |
| Volume | 5Pages:9635-9649 |
| Abstract | Fluorine easily substitutes hydrogen in DLC films due to its monovalence and high electronegativity. The peculiarities of fluorine bestow low surface energy, low inner stress, good thermal stability, preeminent tribological properties and biocompatibility on fluorine-containing, diamond-like carbon (F-DLC) films. Although there are some reviews that introduce the important advances in DLC films, they are not particularly focused on the promising F-DLC films. In this review, we mainly concentrate on the mechanical and tribological properties of F-DLC films. The mechanical properties, including hardness, modulus, and inner stress, will be discussed thoroughly. More importantly, the eminent tribological properties of F-DLC films would be emphasized based on the surface passivation and repulsive forces induced by fluorine atoms from the surface chemical and micro-mechanical viewpoints. Finally, some existing challenges and promising breakthroughs about F-DLC films are also proposed. It is expected that these films would be produced on a large scale and applied extensively in industrial applications such as micro-electro-mechanical systems, ultralarge scale integrated circuits, thin film transistor liquid crystal displays and biomedical devices. |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1039/c4ra14078h |
| Funding Organization | the National Natural Science Foundation of China (Grant nos 51275508;51205383) |
| Indexed By | SCI |
| If | 3.289 |
| Language | 英语 |
| Funding Project | 纳米润滑研究组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/19348 |
| Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Zhang JY(张俊彦); Zhang B(张斌) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.University of Chinese Academy of Sciences, Beijing 100049, P. R. China |
| Recommended Citation GB/T 7714 | Zhang LF,Wang FG,Qiang L,et al. Recent advances in the mechanical and tribological properties of fluorine-containing DLC films[J]. RSC Advances,2015,5:9635-9649. |
| APA | Zhang LF.,Wang FG.,Qiang L.,Gao KX.,Zhang B.,...&张斌.(2015).Recent advances in the mechanical and tribological properties of fluorine-containing DLC films.RSC Advances,5,9635-9649. |
| MLA | Zhang LF,et al."Recent advances in the mechanical and tribological properties of fluorine-containing DLC films".RSC Advances 5(2015):9635-9649. |
| Files in This Item: | ||||||
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| Recent advances in t（1109KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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