| A Low-Stress, Elastic, and Improved Hardness Hydrogenated Amorphous Carbon Film | |
| Department | 先进润滑与防护材料研究发展中心 |
Wang, Qi1; He, Deyan1; Zhang JY(张俊彦)2
| |
| The second department | 固体润滑国家重点实验室 |
| 2015 | |
| Source Publication | Journal of Nanomaterials
 |
| ISSN | 1687-4110 |
| Pages | 543631(1-5) |
| Abstract | The evolution of hydrogenated amorphous carbon films with fullerene-like microstructure was investigated with a different proportion of hydrogen supply in deposition. The results showed at hydrogen flow rate of 50 sccm, the deposited films showed a lower compressive stress (lower 48.6%), higher elastic recovery (higher 19.6%, near elastic recovery rate 90%), and higher hardness (higher 7.4%) compared with the films deposited without hydrogen introduction. Structural analysis showed that the films with relatively high sp2 content and low bonded hydrogen content possessed high hardness, elastic recovery rate, and low compressive stress. It was attributed to the curved graphite microstructure, which can form three-dimensional covalently bonded network. |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1155/2015/543631 |
| Funding Organization | the Ph.D. Programs Foundation of Ministry of Education of China with Grant no. 20100211120017 |
| Indexed By | SCI |
| If | 1.644 |
| Language | 英语 |
| Funding Project | 纳米润滑研究组 |
| compositor | 第二作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/18541 |
| Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Wang, Qi |
| Affiliation | 1.Lanzhou Univ, Sch Phys, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
| Recommended Citation GB/T 7714 | Wang, Qi,He, Deyan,Zhang JY. A Low-Stress, Elastic, and Improved Hardness Hydrogenated Amorphous Carbon Film[J]. Journal of Nanomaterials,2015:543631(1-5). |
| APA | Wang, Qi,He, Deyan,&Zhang JY.(2015).A Low-Stress, Elastic, and Improved Hardness Hydrogenated Amorphous Carbon Film.Journal of Nanomaterials,543631(1-5). |
| MLA | Wang, Qi,et al."A Low-Stress, Elastic, and Improved Hardness Hydrogenated Amorphous Carbon Film".Journal of Nanomaterials (2015):543631(1-5). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 543631.pdf（2823KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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