| The role of trace Ti concentration on the evolution of microstructure and properties of duplex doped Ti(Ag)/DLC films | |
| Department | 先进润滑与防护材料研究发展中心 |
Ji L(吉利)1 ; Wu YX(吴艳霞)1,2; Li HX(李红轩)1; Song H(宋惠)1,2; Liu XH(刘晓红)1; Ye YP(冶银平)1; Chen JM(陈建敏)1; Zhou HD(周惠娣)1; Liu, Liu3; Ji L(吉利); Li HX(李红轩)
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| The second department | 固体润滑国家重点实验室 |
| 2015 | |
| Source Publication | Vacuum
 |
| ISSN | 0042-207X |
| Volume | 115Pages:23-30 |
| Abstract | Trace Ag–Ti co-doped diamond-like carbon (DLC) films were prepared on stainless steel and silicon (100) substrates by medium frequency unbalanced magnetron sputtering with Ar and CH4 as source gases. The effects of sputtering current of Ti target on the microstructure, mechanical and tribological properties were investigated with the content and format of the doped Ag keeping constant. It can be seen the Ti concentration and sp2C content in the film increase with increasing Ti sputtering current. Furthermore, the doped Ti species changed from the form of metallic phase to TiC with increasing Ti concentration, and the hardness and internal stress of the film decrease firstly and then increase, which is related with the microstructural change induced by trace Ti incorporation. Finally, the duplexed-nanocomposite film with 1.600 at.% Ti shows relatively high hardness and H/E and H3/E2 ratio, which is mainly responsible for the superior tribological properties. |
| Keyword | Ti(Ag)/a-c:h Film Microstructure Mechanical Properties Tribological Properties |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.vacuum.2015.01.023 |
| Funding Organization | the 973 Project of China (No. 2013CB632300);the National Natural Science Foundation of China (Grant No. 51275509;51405474) |
| Indexed By | SCI |
| If | 1.558 |
| Language | 英语 |
| Funding Project | 磨损与表面工程课题组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/18405 |
| Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Ji L(吉利); Li HX(李红轩) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China 3.Tianshui Normal Univ, Coll Life Sci & Chem, Tianshui 741000, Peoples R China |
| Recommended Citation GB/T 7714 | Ji L,Wu YX,Li HX,et al. The role of trace Ti concentration on the evolution of microstructure and properties of duplex doped Ti(Ag)/DLC films[J]. Vacuum,2015,115:23-30. |
| APA | Ji L.,Wu YX.,Li HX.,Song H.,Liu XH.,...&李红轩.(2015).The role of trace Ti concentration on the evolution of microstructure and properties of duplex doped Ti(Ag)/DLC films.Vacuum,115,23-30. |
| MLA | Ji L,et al."The role of trace Ti concentration on the evolution of microstructure and properties of duplex doped Ti(Ag)/DLC films".Vacuum 115(2015):23-30. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 201523-30.pdf（2137KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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