| Erosion Mechanism of MoS2-Based Films Exposed to Atomic Oxygen Environments | |
| Department | 固体润滑国家重点实验室 |
Wang P(王鹏)1 ; Qiao L(乔丽)1; Xu J(许佼)1; Li WX(李无暇)2; Liu WM(刘维民)1; Wang P(王鹏)
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| 2015 | |
| Source Publication | ACS Applied Materials and Interfaces
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| ISSN | 1944-8244 |
| Volume | 7Issue:23Pages:12943-12950 |
| Abstract | The erosion mechanism of magnetron sputtered MoS2 films exposed to the atomic oxygen environment was studied and compared with the Ti-doped MoS2 and MoS2/Ti multilayer films. The compositional and structural changes were investigated as a function of incident fluence by Rutherford back scattering (RBS) and focused ion beam combining with scanning electron microscopy (FIB&SEM). The RBS results indicate that the sulfur atoms are eroded by the incident atomic oxygen atoms and the removed sulfur amount increases but the erosion rate decreases with increasing of incident fluence. For pure MoS2 films the erosion process turns to saturate at the end of investigated fluence of 4.8 × 1021 O cm–2, and for Ti-doped and MoS2/Ti multilayer films the saturation of sulfur erosion is much earlier around incident fluence of 5.2 × 1019 and 2.6 × 1019 O cm–2, respectively. FIB cross-section results reveal that pores structures present in the as-deposited MoS2 films provide a reaction highway, which allows the incident atomic oxygen to be able to reach and react with the sulfur at bottom. Introducing titanium doping or MoS2/Ti multilayer structures definitely reduce the density of pores and defects in the initial films, consequently, erosion process is suppressed or blocked, and the instinct lubricant properties of MoS2 phases can be well-retained in vacuum sliding conditions. |
| Keyword | Atomic Oxygen Exposure Mos2 Films Erosion Mechanism Titanium Doping Multilayer |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1021/acsami.5b02709 |
| Funding Organization | the National Natural Science Foundation of China (Grants 51227804;11475236;91023041);973 projects (2013CB632300) of the ministry of Science and technology of China |
| Indexed By | SCI |
| If | 7.145 |
| Language | 英语 |
| Funding Project | 辐照环境下润滑与防护材料研究 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/18316 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Wang P(王鹏) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Inst Phys, Beijing 100190, Peoples R China |
| Recommended Citation GB/T 7714 | Wang P,Qiao L,Xu J,et al. Erosion Mechanism of MoS2-Based Films Exposed to Atomic Oxygen Environments[J]. ACS Applied Materials and Interfaces,2015,7(23):12943-12950. |
| APA | Wang P,Qiao L,Xu J,Li WX,Liu WM,&王鹏.(2015).Erosion Mechanism of MoS2-Based Films Exposed to Atomic Oxygen Environments.ACS Applied Materials and Interfaces,7(23),12943-12950. |
| MLA | Wang P,et al."Erosion Mechanism of MoS2-Based Films Exposed to Atomic Oxygen Environments".ACS Applied Materials and Interfaces 7.23(2015):12943-12950. |
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| File Name/Size | DocType | Version | Access | License | ||
| Erosion Mechanism of（8793KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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