| Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering | |
| Department | 固体润滑国家重点实验室 |
Wang YX(王永欣); Wang LP(王立平) ; Zhang GA(张广安); Wang SC(王顺才); R.J.K. Wood; Xue QJ(薛群基)
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| 2010 | |
| Source Publication | Surface and Coatings Technology
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| ISSN | 0257-8972 |
| Volume | 205Pages:793-800 |
| Abstract | Ti-doped graphite-like carbon (GLC) films with different microstructures and compositions were fabricatedusing magnetron sputtering technique. The influence of bias voltages on microstructure, hardness, internalstress, adhesion strength and tribological properties of the as-deposited GLC films were systemicallyinvestigated. The results showed that with increasing bias voltage, the graphite-like structure component(sp2bond) in the GLC films increased, and the films gradually became much smoother and denser. Thenanohardness and compressive internal stress increased significantly with the increase of bias voltage up to−300 V and were constant after −400 V. GLC films deposited with bias voltages in the range of -300–-400 Vexhibited optimum adhesion strength with the substrates. Both the friction coefficients and the wear rates ofGLC films in ambient air and water decreased with increasing voltages in the lower bias range (0–-300 V)however, they were constant for higher bias values (beyond −300 V) . In addition, the wear rate of GLC filmsunder water-lubricated condition was significantly higher for voltages below −300 V but lower at highvoltage than that under dry friction condition. The excellent tribological performance of Ti-doped GLC filmsprepared at higher bias voltages of −300–-400 V are attributed to their high hardness, tribo-inducedlubricating top-layers and planar (2D) graphite-like structure. |
| Keyword | Graphite-like Carbon (Glc) FIlm Bias Voltage Microstructure Water Environment Tribological Property |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | National Natural Science Foundation of China (No. 50905178 & 50823008);the 863 Programof Chinese Ministry of Science and Technology (No. 2009AA03Z105) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 低维材料摩擦学组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/1062 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Wang LP(王立平) |
| Recommended Citation GB/T 7714 | Wang YX,Wang LP,Zhang GA,et al. Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering[J]. Surface and Coatings Technology,2010,205:793-800. |
| APA | 王永欣,王立平,张广安,王顺才,R.J.K. Wood,&薛群基.(2010).Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering.Surface and Coatings Technology,205,793-800. |
| MLA | 王永欣,et al."Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering".Surface and Coatings Technology 205(2010):793-800. |
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| 2010793-800.pdf（1727KB） | 开放获取 | License | View Application Full Text | |||
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